Research Catalog

Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

Title
Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California / Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society [and others].
Publication
Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Toprac, Anthony J. (Anthony John), 1955-
  • Dang, Kim.
  • Society of Photo-optical Instrumentation Engineers.
  • Electrochemical Society.
Description
vii, 310 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3882
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882.
Subject
  • Integrated circuits > Design and construction > Congresses
  • Plasma etching > Congresses
  • Metallizing > Congresses
  • Dielectric films > Congresses
  • Process control > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819434795
OCLC
ocm42779272
Owning Institutions
Columbia University Libraries