Research Catalog

Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California

Title
Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California / Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society [and others].
Publication
Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Graef, Mart.
  • Patel, Divyesh N.
  • Society of Photo-optical Instrumentation Engineers.
  • Electrochemical Society.
Description
ix, 184 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3883
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3883.
Alternative Title
  • Multilevel interconnect technology 3
  • Multilevel interconnect technology three
Subject
  • Integrated circuits > Design and construction > Congresses
  • Plasma etching > Congresses
  • Metallizing > Congresses
  • Dielectric films > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819434809
OCLC
ocm42777200
Owning Institutions
Columbia University Libraries