Research Catalog

MEMS reliability for critical and space applications : 21-22 September, 1999, Santa Clara, California

Title
MEMS reliability for critical and space applications : 21-22 September, 1999, Santa Clara, California / Russell A. Lawton [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology [and others].
Publication
Bellingham, Washington : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Lawton, Russell A.
  • Society of Photo-optical Instrumentation Engineers.
  • Solid State Technology (Organization)
Description
vi, 176 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 3880
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3880.
Subject
Microelectromechanical systems > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819434779
OCLC
ocm42656765
Owning Institutions
Columbia University Libraries