Research Catalog

Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

Title
Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California / John C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Stover, John C.
  • Society of Photo-optical Instrumentation Engineers.
Description
vii, 136 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3619
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3619.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819430897
OCLC
ocm41183356
Owning Institutions
Columbia University Libraries