Research Catalog

Plasma etching processes for sub-quarter micron devices : proceedings of the International Symposium

Title
Plasma etching processes for sub-quarter micron devices : proceedings of the International Symposium / editor, G.S. Mathad ... [and others ; cosponsored by] Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].
Publication
Pennington, NJ : Electrochemical Society, [2000], ©2000.

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Additional Authors
  • Mathad, G. S.
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Electrochemical Society. Electronics Division.
  • International Symposium on Plasma Etching Processes for Sub-Quarter Micron Devices (1999 : Honolulu, Hawaii)
Description
x, 378 pages : illustrations; 24 cm.
Series Statement
Proceedings ; v. 99-30
Uniform Title
Proceedings (Electrochemical Society) ; 99-30.
Subjects
Note
  • "This proceedings volume contains the papers presented at the symposium on Plasma Etching Processes for Sub-Quarter Micron Devices. The symposium ... was held in Honolulu, HI, October 17-22, 1999 ..."--Pref.
Bibliography (note)
  • Includes bibliographic references and indexes.
ISBN
1566772532
LCCN
00101648
OCLC
ocm44074969
Owning Institutions
Columbia University Libraries