Research Catalog
19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California
- Title
- 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California / Frank E. Abboud, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
- Author
- Symposium on Photomask Technology (19th : 1999 : Monterey, Calif.)
- Publication
- Bellingham, Wash., USA : SPIE, [1999], ©1999.
Items in the Library & Off-site
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2 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v.1 | Text | Request in advance | TK7874 .S9438 1999g v.1 | Off-site | |
| v.2 | Text | Request in advance | TK7874 .S9438 1999g v.2 | Off-site |
Holdings
Details
- Additional Authors
- Description
- 2 volumes (xv, 1022 pages) : illustrations (some color); 28 cm.
- Series Statement
- SPIE proceedings series ; v. 3873
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 3873.
- Alternative Title
- Nineteenth Annual Symposium on Photomask Technology
- Symposium on Photomask Technology
- Photomask technology
- Subject
- Note
- Eighteenth conference called: Symposium on Photomask Technology and Management.
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 081943468X
- OCLC
- ocm43381540
- SCSB-3862096
- Owning Institutions
- Columbia University Libraries