Research Catalog

Title

Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications / by Hugh O. Pierson.

Author

Pierson, Hugh O.

Publication

Norwich, N.Y. : Noyes Publications/William Andrew Pub., [1999], ©1999.

Items in the Library & Off-site

Holdings

Details

Description

xxiv, 482 pages : illustrations; 25 cm.

Summary

• "Since the publication of the first edition of the Handbook of Chemical Vapor Deposition (CVD) in early 1992, the technology has developed at a rapid rate and the number and scope of its applications and their impact of the market have increased considerably. This process is now a key factor in many industries such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters and many others.
• The size of the CVD market today (1999) is estimated to be at least double that of the market seven years ago. This second edition of the Handbook is an update with a considerably expanded and revised scope."--BOOK JACKET.

Series Statement

Materials science and process technology series

Uniform Title

Materials science and process technology series.

Alternative Title

Handbook of chemical vapor deposition

Subjects

• Chemical vapor deposition > Handbooks, manuals, etc
• Vapor-plating > Handbooks, manuals, etc

Note

• Rev. ed. of: Handbook of chemical vapor deposition (CVD), c1992.

Bibliography (note)

• Includes bibliographical references and index.

Contents

• 1. Introduction and General Considerations -- 2. Fundamentals of Chemical Vapor Deposition -- 3. The Chemistry of CVD -- 4. Metallo-Organic CVD (MOCVD) -- 5. CVD Processes and Equipment -- 6. The CVD of Metals -- 7. The CVD of the Allotropes of Carbon -- 8. The CVD of Non-Metallic Elements -- 9. The CVD of Ceramic Materials: Carbides -- 10. The CVD of Ceramic Materials: Nitrides -- 11. The CVD of Ceramic Materials: Oxides -- 12. The CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides) -- 13. CVD in Electronic Applications: Semiconductors -- 14. CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers -- 15. CVD in Optoelectronic and Ferroelectric Applications -- 16. CVD in Optical Applications -- 17. CVD in Wear- and Corrosion-Resistant Applications -- 18. CVD in Cutting-Tool Applications -- 19. CVD in Fiber, Powder, and Monolithic Applications -- Conversion Guide --
• App. Alternative Processes for Thin-Film Deposition and Surface Modification.

ISBN

0815514328

LCCN

99026065

OCLC

• ocm41090758
• SCSB-3863819

Owning Institutions

Columbia University Libraries