Research Catalog

Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Title
Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others].
Publication
Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Courtois, B. (Bernard)
  • Demidenko, S. N. (Sergeĭ Nikolaevich)
  • Society of Photo-optical Instrumentation Engineers.
  • Institution of Radio and Electronics Engineers, Australia.
  • Queensland. Government State Development.
  • Griffith University Microelectronics Engineering Society.
Description
x, 512 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3893
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3893.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819434949
OCLC
  • ocm43166546
  • SCSB-3866790
Owning Institutions
Columbia University Libraries