Research Catalog

Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France

Title
Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France / Bernard Courtois [and others] chairs/editors ; sponsored by CNRS-INPG-UJF (France) [and others].
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [2000], ©2000.

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Details

Additional Authors
Courtois, B. (Bernard)
Description
xv, 596 pages : illustrations; 28 cm.
Series Statement
Proceedings ; v. 4019
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4019.
Subjects
ISBN
0819436453
OCLC
  • ocm44509803
  • SCSB-3868511
Owning Institutions
Columbia University Libraries