Research Catalog

Sputtering by particle bombardment

Title
Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen [and others].
Publication
Berlin ; New York : Springer-Verlag, 1981-©1991.

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Details

Additional Authors
  • Behrisch, Rainer.
  • Andersen, Hans Henrik.
Description
3 volumes : illustrations; 24 cm.
Series Statement
Topics in applied physics ; v. 47, 52, 64
Uniform Title
Topics in applied physics ; v. 47, 52, 64.
Alternative Title
Particle bombardment.
Subject
  • Sputtering (Physics)
  • Solids > Effect of radiation on
  • Surfaces (Physics) > Effect of radiation on
Bibliography (note)
  • Includes bibliographical references and indexes.
Contents
1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
ISBN
0387105212 (v. 1 : U.S.)
LCCN
81004313
OCLC
  • ocm07306737
  • SCSB-3885845
Owning Institutions
Columbia University Libraries