Research Catalog

Silicon device processing ; proceedings

Title
Silicon device processing ; proceedings / Charles P. Marsden, editor.
Author
Symposium on Silicon Device Processing (1970 : Gaithersburg, Md.)
Publication
Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.

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TextRequest in advance QD181.S6 S9 1970Off-site

Holdings

Details

Additional Authors
  • Marsden, Charles P.
  • American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics.
Description
x, 457 pages : illustrations; 27 cm.
Series Statement
National Bureau of Standards special publication 337
Uniform Title
NBS special publication ; 337.
Subject
Note
  • "A United States Department of Commerce publication."
  • "CODEN: XNBSA."
  • "Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
Bibliography (note)
  • Includes bibliographical references.
LCCN
74608543
OCLC
  • ocm00144581
  • SCSB-3912214
Owning Institutions
Columbia University Libraries