Research Catalog

Optical microlithography XIII : 1-3 March, 2000, Santa Clara, [California], USA

Title
Optical microlithography XIII : 1-3 March, 2000, Santa Clara, [California], USA / Christopher J. Progler, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
Publication
Bellingham, Washington : SPIE, [2000], ©2000.

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Holdings

Details

Additional Authors
  • Progler, Christopher J.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • International SEMATECH.
Description
2 volumes : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4000
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4000.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819436186
OCLC
  • ocm44738845
  • SCSB-3927955
Owning Institutions
Columbia University Libraries