Research Catalog

Thin film technology

Title
Thin film technology / by Robert W. Berry, Peter M. Hall [and] Murry T. Harris.
Author
Berry, Robert W.
Publication
Princeton, N.J. : Van Nostrand, [1968]

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Details

Additional Authors
  • Hall, Peter M. (Peter Michael), 1934-
  • Harris, Murray T.
Description
xxi, 706 pages : illustrations; 24 cm.
Series Statement
The Bell Telephone Laboratories series
Uniform Title
Bell Telephone Laboratories series.
Subject
  • Thin films
  • Thin-film circuits
  • Integrated circuits
Bibliography (note)
  • Includes bibliographies.
LCCN
68025817
OCLC
  • ocm00282160
  • SCSB-3928869
Owning Institutions
Columbia University Libraries