Research Catalog

2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA

Title
2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA / Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics.
Author
International Symposium on Plasma Process-Induced Damage (5th : 2000 : Santa Clara, Calif.)
Publication
Santa Clara, California : Northern California Chapter of the American Vacuum Society, [2000], ©2000.

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Details

Additional Authors
  • Koyanagi, Mitsumasa.
  • Engelhardt, Manfred.
  • Gabriel, Calvin T.
  • American Vacuum Society.
  • IEEE Electron Devices Society.
  • Ōyō Butsuri Gakkai.
Description
6 unnumbered pages, i, 172 pages : illustrations; 28 cm
Alternative Title
  • Plasma process-induced damage
  • P²ID
Subjects
Note
  • P²ID--cover.
  • "IEEE Catalog Number 00TH8479"--verso of T.p.
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0965157741
OCLC
  • ocm45300774
  • SCSB-3986283
Owning Institutions
Columbia University Libraries