Research Catalog

Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

Title
Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom / Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society [and others] ; cooperating organizations, IEE--Institute of Electrical Engineers [and] IMechE--the Institution of Mechanical Engineers (UK).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Details

Additional Authors
  • Syms, R. R. A.
  • Society of Photo-optical Instrumentation Engineers.
  • European Optical Society.
  • Institution of Electrical Engineers.
  • Institution of Mechanical Engineers (Great Britain)
Description
viii, 192 pages : illustrations; 28 cm.
Series Statement
  • Proceedings EurOpt series
  • SPIE proceedings series ; v. 4075
Uniform Title
  • Proceedings of SPIE--the International Society for Optical Engineering ; v. 4075.
  • Europto series.
Subject
  • Microelectromechanical systems > Congresses
  • Optoelectronic devices > Congresses
  • Microfabrication > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819437123
OCLC
  • ocm45141997
  • SCSB-3996890
Owning Institutions
Columbia University Libraries