Research Catalog
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
- Title
- Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski.
- Author
- Lyshevski, Sergey Edward.
- Publication
- Boca Raton, Fla. : CRC Press, [2001], ©2001.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7875 .L96 2001 | Off-site |
Holdings
Details
- Description
- 338 pages : illustrations; 25 cm.
- Summary
- "Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
- Series Statement
- Nano- and microscience, engineering, technology, and medicine series
- Uniform Title
- Nano- and microscience, engineering, technology, and medicine series.
- Subject
- Microelectromechanical systems
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Nano- and Microengineering, and Nano- and Microtechnologies -- 2. Mathematical Models and Design of Nano- and Microelectromechanical Systems -- 3. Structural Design, Modeling, and Simulation -- 4. Control of Nano- and Microelectromechanical Systems.
- ISBN
- 0849309166 (alk. paper)
- LCCN
- 00057953
- OCLC
- ocm44541881
- SCSB-4006996
- Owning Institutions
- Columbia University Libraries