Research Catalog

Process control and diagnostics : 18-19 September 2000, Santa Clara, USA

Title
Process control and diagnostics : 18-19 September 2000, Santa Clara, USA / Michael L. Miller, Kaihan A. Ashtiani, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TS156.8 .P73 2000gOff-site

Holdings

Details

Additional Authors
  • Miller, Michael L.
  • Ashtiani, Kaihan A.
  • Society of Photo-optical Instrumentation Engineers.
  • Solid State Technology (Organization)
  • Electrochemical Society.
  • American Vacuum Society.
Description
ix, 374 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4182
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4182.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
081943843X
OCLC
  • ocm45426357
  • SCSB-4039345
Owning Institutions
Columbia University Libraries