Research Catalog

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Title
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA / David Burnett, Shinʼichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Details

Additional Authors
  • Burnett, David.
  • Kimura, Shiníchiro.
  • Singh, Bhanwar.
  • Society of Photo-optical Instrumentation Engineers.
  • Solid State Technology (Organization)
  • Electrochemical Society.
  • American Vacuum Society.
Description
ix, 344 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4181
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4181.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819438421
OCLC
  • ocm45483032
  • SCSB-4039349
Owning Institutions
Columbia University Libraries