Research Catalog

MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA

Title
MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA / Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7875 .M46 2000gOff-site

Holdings

Details

Additional Authors
  • Lawton, Russell A.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
v, 146 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4180
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4180.
Alternative Title
Microelectromechanical systems reliability for critical applications
Subject
Microelectromechanical systems > Reliability > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819438367
OCLC
  • ocm45410860
  • SCSB-4039347
Owning Institutions
Columbia University Libraries