Research Catalog

Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA

Title
Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA / Ghanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Details

Additional Authors
  • Al-Jumaily, Ghanim A.
  • Duparré, Angela.
  • Singh, Bhanwar.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 328 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4099
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4099.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819437441
OCLC
  • ocm45425433
  • SCSB-4039352
Owning Institutions
Columbia University Libraries