Research Catalog

Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA

Title
Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA / Sing H. Lee, Eric G. Johnson, chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Additional Authors
  • Lee, S. H. (Sing H.), 1939-
  • Johnson, Eric Gunnar, 1936-
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
v, 180 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4179
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4179.
Subject
  • Integrated optics > Congresses
  • Optoelectronic devices > Industrial applications > Congresses
  • Miniature electronic equipment > Industrial applications > Congresses
  • Microelectromechanical systems > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819438359
OCLC
  • ocm45425326
  • SCSB-4039355
Owning Institutions
Columbia University Libraries