Research Catalog

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

Title
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA / M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Additional Authors
  • Motamedi, M. Edward.
  • Göring, Rolf.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
viii, 412 pages : illustrations (some color); 28 cm.
Series Statement
SPIE proceedings series ; v. 4178
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4178.
Alternative Title
Microoptoelectromechanical systems and miniaturized systems
Subject
  • Microelectromechanical systems > Congresses
  • Miniature electronic equipment > Congresses
  • Micromechanics > Congresses
  • Optical scanners > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819438340
OCLC
  • ocm45635003
  • SCSB-4039360
Owning Institutions
Columbia University Libraries