Research Catalog

Advanced microelectronic processing techniques : 28-30 November 2000, Singapore

Title
Advanced microelectronic processing techniques : 28-30 November 2000, Singapore / H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].
Publication
Bellingham, Wash., USA : SPIE, [2000], ©2000.

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Details

Additional Authors
  • Harrison, H. B., 1930-
  • Wee, Andrew T. S.
  • Gupta, Subhash, 1955-
  • Society of Photo-optical Instrumentation Engineers.
  • Nanyang Technological University.
  • Institute of Physics, Singapore.
Description
xix, 212 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4227
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4227.
Subjects
Note
  • Errata p. tipped in.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819438995
OCLC
  • ocm46346568
  • SCSB-4114745
Owning Institutions
Columbia University Libraries