Research Catalog

2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA

Title
2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA / Manfred Englehardt, Terence Hook, and and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics.
Author
International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey, Calif.)
Publication
Santa Clara, California : Northern California Chapter of the American Vacuum Society, [2001], ©2001.

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Holdings

Details

Additional Authors
  • Engelhardt, Manfred.
  • Hook, Terence.
  • Gabriel, Calvin T.
  • American Vacuum Society.
  • IEEE Electron Devices Society.
  • Ōyō Butsuri Gakkai.
Description
5 unnumbered pages, i, 128 pages : illustrations; 28 cm
Alternative Title
  • P²ID
  • Plasma- and process-induced damage
  • Plasma process induced-damage
Subjects
Note
  • Previous Symposium entitled: International Symposium on Plasma Induced-Damage.
  • "P²ID"--Cover.
  • "IEEE Catalog Number (softbound) 01TH8538 ; IEEE Catalog Number (CD-ROM) 01TH8538C"--verso of T.p.
Bibliography (note)
  • Includes bibliographi references and author index.
ISBN
  • 096515775X (softbound)
  • 0965157768 (CD-ROM)
OCLC
  • ocm47163463
  • SCSB-4143825
Owning Institutions
Columbia University Libraries