Research Catalog

Materials, technology, and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A

Title
Materials, technology, and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A / editors, G.S. Oehrlein [and others].
Publication
Warrendale, Pa. : Materials Research Society, [2001], ©2001.

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StatusFormatAccessCall NumberItem Location
TextRequest in advance TK7871.85 .M36783 2001Off-site

Holdings

Details

Additional Authors
Oehrlein, G. S.
Description
1 volume (various pagings) : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 612
Uniform Title
Materials Research Society symposia proceedings ; v. 612.
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558994270
LCCN
00069552
OCLC
  • ocm45707698
  • SCSB-4157458
Owning Institutions
Columbia University Libraries