Research Catalog

Silicon processing for the VLSI era

Title
Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Author
Wolf, Stanley, 1943-
Publication
Sunset Beach, Calif. : Lattice Press, ©2000->

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v.1TextRequest in advance TK7874 .W635 2000 v.1Off-site

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Details

Additional Authors
Tauber, Richard N.
Description
volumes : illustrations; 25 cm
Subject
  • Integrated circuits > Very large scale integration
  • Silicon
Note
  • JM20000323.
Bibliography (note)
  • Includes bibliographies and indexes.
Contents
v. 1. Process technology.
ISBN
0961672161 (v.1)
OCLC
  • ocm43698493
  • SCSB-4180028
Owning Institutions
Columbia University Libraries