Research Catalog

Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA

Title
Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA / Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [2001], ©2001.

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Details

Additional Authors
  • Tobin, Kenneth W.
  • Lakhani, Fred.
  • Society of Photo-optical Instrumentation Engineers.
Description
vii, 156 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4275
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4275.
Alternative Title
Metrology based control for micro manufacturing
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819439533
OCLC
  • ocm47779380
  • SCSB-4183773
Owning Institutions
Columbia University Libraries