Research Catalog

MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

Title
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK).
Publication
Bellingham, Wash., USA : SPIE, [2001], ©2001.

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Additional Authors
  • Behringer, Uwe F. W.
  • Uttamchandani, Deepak.
  • Society of Photo-optical Instrumentation Engineers.
  • Scottish Enterprise.
  • European Optical Society.
  • Institution of Electrical Engineers.
Description
ix, 442 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4407
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4407.
Alternative Title
Microelectromechanical systems design, fabrication, characterization, and packaging
Subject
  • Microelectromechanical systems > Design and construction > Congresses
  • Microfabrication > Congresses
  • Microelectronic packaging > Congresses
  • Mechatronics > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819441082
OCLC
  • ocm47861650
  • SCSB-4183771
Owning Institutions
Columbia University Libraries