Research Catalog

Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA

Title
Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA / Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) [and others].
Publication
Bellingham, Washington : SPIE, [2001], ©2001.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance QC176.8.M5 M4 2001gOff-site

Holdings

Details

Additional Authors
  • Karam, Jean-Michel.
  • Yasaitis, John.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
x, 486 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4557
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819442852
OCLC
  • ocm48519252
  • SCSB-4225565
Owning Institutions
Columbia University Libraries