Research Catalog

Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA

Title
Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA / Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) [and others].
Publication
Bellingham, Washington : SPIE, [2001], ©2001.

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Details

Additional Authors
  • Karam, Jean-Michel.
  • Yasaitis, John.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
x, 486 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4557
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.
Subject
  • Micromachining > Congresses
  • Microfabrication > Congresses
  • Electromechanical devices > Design and construction > Congresses
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819442852
OCLC
  • ocm48519252
  • SCSB-4225565
Owning Institutions
Columbia University Libraries