Research Catalog
MEMS and NEMS : systems, devices, and structures
- Title
- MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski.
- Author
- Lyshevski, Sergey Edward.
- Publication
- Boca Raton, Fla. : CRC Press, [2002], ©2002.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7875 .L9597 2002 | Off-site |
Holdings
Details
- Description
- 461 pages : illustrations; 25 cm.
- Series Statement
- Nano- and microscience, engineering, technology, and medicine series
- Uniform Title
- Nano- and microscience, engineering, technology, and medicine series.
- Subject
- Microelectromechanical systems
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Overview and Introduction -- 2. New Trends in Engineering and Science: Micro- and Nanoscale Systems -- 3. Fundamentals of MEMS Fabrication -- 4. Devising and Synthesis of MEMS and NEMS -- 5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures -- 6. Nanosystems, Quantum Mechanics, and Mathematical Models -- 7. Control of Microelectromechanical Systems -- 8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS.
- ISBN
- 0849312620 (alk. paper)
- LCCN
- 2001049944
- OCLC
- ocm48056964
- SCSB-4257228
- Owning Institutions
- Columbia University Libraries