Research Catalog

Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, [California] USA

Title
Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, [California] USA / Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Washington : SPIE, [2001], ©2001.

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Details

Additional Authors
  • Duparré, Angela.
  • Singh, Bhanwar.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 294 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4449
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4449.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819441635
OCLC
  • ocm49011017
  • SCSB-4257403
Owning Institutions
Columbia University Libraries