Research Catalog

Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

Title
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia / Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization, IEEE South Australia Section.
Publication
Bellingham, Washington : SPIE, [2001], ©2001.

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Details

Additional Authors
  • Chiao, Jung-Chih.
  • Society of Photo-optical Instrumentation Engineers.
  • United States. Air Force. Asian Office of Aerospace Research and Development.
  • Institute of Electrical and Electronics Engineers. South Australia Section.
Description
xi, 538 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4592
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4592.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819443220
OCLC
  • ocm49052655
  • SCSB-4262834
Owning Institutions
Columbia University Libraries