Research Catalog
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
- Title
- Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell [and others].
- Publication
- Warrendale, Pa. : Materials Research Society, [2002], ©2002.
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Not available - Please for assistance. | Text | Request in advance | TK7874.76 .G3823 2002 | Off-site |
Holdings
Details
- Additional Authors
- Campbell, S. A.
- Description
- 1 volume (various pagings) : illustrations; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 670
- Uniform Title
- Materials Research Society symposia proceedings ; v. 670.
- Subject
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 1558996060
- LCCN
- 2002141577
- OCLC
- ocm49513689
- SCSB-4271956
- Owning Institutions
- Columbia University Libraries