Research Catalog

Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.

Title
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell [and others].
Publication
Warrendale, Pa. : Materials Research Society, [2002], ©2002.

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Holdings

Details

Additional Authors
Campbell, S. A.
Description
1 volume (various pagings) : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 670
Uniform Title
Materials Research Society symposia proceedings ; v. 670.
Subject
  • Integrated circuits > Materials > Congresses
  • Silicides > Congresses
  • Gate array circuits > Congresses
  • Electric leakage > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558996060
LCCN
2002141577
OCLC
  • ocm49513689
  • SCSB-4271956
Owning Institutions
Columbia University Libraries