Research Catalog
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- Title
- Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA / Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash., USA : SPIE, [2002], ©2002.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7874 .D47565 2002g | Off-site |
Holdings
Details
- Additional Authors
- Description
- xv, 628 pages : illustrations (some color); 28 cm.
- Series Statement
- SPIE proceedings series, 0277-786X ; v. 4692
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 4692.
- Subjects
- Integrated circuits > Design and construction > Congresses
- Quality control > Congresses
- Semiconductors > Design and construction > Congresses
- Semiconductor wafers > Defects > Analysis > Congresses
- Microelectronics industry > Quality control > Congresses
- Integrated circuits > Defects > Analysis > Congresses
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819444391
- OCLC
- ocm50514162
- SCSB-4303429
- Owning Institutions
- Columbia University Libraries