Research Catalog

Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA

Title
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA / Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
Publication
Bellingham, Washington SPIE, [2002], ©2002.

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Holdings

Details

Additional Authors
  • Yen, Anthony.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • International SEMATECH.
Description
2 volumes : illustrations (some color); 28 cm.
Series Statement
SPIE proceedings series ; v. 4691
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4691.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819444375
OCLC
  • ocm50597859
  • SCSB-4308735
Owning Institutions
Columbia University Libraries