Research Catalog

10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada

Title
10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada / editors: J. Gelpey [and others] ; IEEE Electron Devices Society.
Author
International Conference on Advanced Thermal Processing of Semiconductors (10th : 2002 : Vancouver, B.C.)
Publication
Piscataway, New Jersey : IEEE, [2002], ©2002.

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Details

Additional Authors
  • Gelpey, Jeffrey C.
  • IEEE Electron Devices Society.
Description
[ix], 241 pages : illustrations; 28 cm
Alternative Title
  • Advanced thermal processing of semiconductors
  • RTP 2002
Subject
  • Semiconductors > Heat treatment > Congresses
  • Rapid thermal processing > Congresses
  • Semiconductor doping > Congresses
  • Semiconductors > Defects > Congresses
Note
  • "IEEE Catalog Number: 02EX574"--verso of T.p.
Bibliography (note)
  • Includes bibliographic references.
ISBN
0780374657
LCCN
2002103269
OCLC
  • ocm50756432
  • SCSB-4309088
Owning Institutions
Columbia University Libraries