Research Catalog

Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA

Title
Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company [and others].
Publication
Bellingham, Wash. : SPIE, [2002], ©2002.

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Details

Additional Authors
  • Gu, Zu-Han.
  • Maradudin, Alexei A., 1931-
  • Society of Photo-optical Instrumentation Engineers.
  • Boeing Company.
Description
vii, 186 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 4780
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4780.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819445479
OCLC
  • ocm51110642
  • SCSB-4322538
Owning Institutions
Columbia University Libraries