Research Catalog

Silicon materials--processing, characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.

Title
Silicon materials--processing, characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. / editors, Janice L. Veteran [and others].
Publication
Warrendale, Pa. : Materials Research Society, [2002], ©2002.

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Details

Additional Authors
Veteran, Janice L.
Description
xvii, 672 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 716
Uniform Title
Materials Research Society symposia proceedings ; v. 716.
Subject
  • Semiconductors > Congresses
  • Semiconductors > Reliability > Congresses
  • Silicon > Congresses
  • Silicon alloys > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558996524
LCCN
2002035989
OCLC
  • ocm50684741
  • SCSB-4327188
Owning Institutions
Columbia University Libraries