Research Catalog

Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia

Title
Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia / Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by RMIT University (Australia) [and others] ; cooperating organizations, Swinburne University of Technology (Australia) [and others].
Publication
Bellingham, Wash., USA : SPIE, [2002], ©2002.

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Additional Authors
  • Sood, Dinesh K.
  • Malshe, Ajay P.
  • Maeda, R. (Ryutaro)
  • Society of Photo-optical Instrumentation Engineers.
  • RMIT University.
  • Swinburne University of Technology.
  • International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2002 : RMIT University)
Description
xi, 476 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4936
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4936.
Subject
  • Microelectronics > Congresses
  • Microelectromechanical systems > Congresses
  • Nanotechnology > Congresses
  • Mechatronics > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819447315
OCLC
  • ocm51774995
  • SCSB-4337134
Owning Institutions
Columbia University Libraries