Research Catalog

Low dielectric constant materials for IC applications

Title
Low dielectric constant materials for IC applications / P.S. Ho, J. Leu, W.W. Lee (eds.).
Publication
Berlin ; New York : Springer, [2003], ©2003.

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Details

Additional Authors
  • Ho, P. S.
  • Leu, J. (Jihperng), 1958-
  • Lee, Wei William.
Description
xix, 309 pages : illustrations; 24 cm.
Series Statement
Springer series in advanced microelectronics, 1437-0387 ; 9
Uniform Title
Springer series in advanced microelectronics ; 9.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
3540678190 (alk. paper)
LCCN
2002066982
OCLC
  • ocm49649922
  • SCSB-4337345
Owning Institutions
Columbia University Libraries