Research Catalog

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

Title
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA / James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2003], ©2003.

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Details

Additional Authors
  • Smith, James H.
  • Krulevitch, Peter A. (Peter Allen)
  • Lakner, Hubert K.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
xlvi, 368 pages : illustrations (some color); 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4983
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4983.
Alternative Title
Microelectromechanical systems and miniaturized systems III
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819447838
OCLC
  • ocm51894276
  • SCSB-4345432
Owning Institutions
Columbia University Libraries