Research Catalog
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
- Title
- MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA / James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA).
- Publication
- Bellingham, Wash., USA : SPIE, [2003], ©2003.
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Status | Format | Access | Call Number | Item Location |
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Text | Request in advance | TK7874 .M5326 2003g | Off-site |
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Details
- Additional Authors
- Description
- xlvi, 368 pages : illustrations (some color); 28 cm.
- Series Statement
- SPIE proceedings series, 0277-786X ; v. 4983
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 4983.
- Alternative Title
- Microelectromechanical systems and miniaturized systems III
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819447838
- OCLC
- ocm51894276
- SCSB-4345432
- Owning Institutions
- Columbia University Libraries