Research Catalog

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

Title
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA / Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2003], ©2003.

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Details

Additional Authors
  • Johnson, Eric G.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
xlii, 262 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4984
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4984.
Alternative Title
Micromachining technology for micro-optics.
Subject
  • Integrated optics > Congresses
  • Miniature electronic equipment > Design and construction > Congresses
  • Optoelectronic devices > Design and construction > Congresses
  • Micromachining > Congresses
  • Microelectromechanical systems > Congresses
  • Nanotechnology > Congresses
Note
  • Earlier conference has title: Micromachining technology for micro-optics.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819447846
OCLC
  • ocm51897916
  • SCSB-4345423
Owning Institutions
Columbia University Libraries