Research Catalog

MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

Title
MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA / Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Publication
Bellingham, Wash., USA : SPIE, [2003], ©2003.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7875 .M48 2003gOff-site

Holdings

Details

Additional Authors
  • Urey, Hakan, 1970-
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology (Organization)
  • Sandia National Laboratories.
Description
xlii, 306 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4985
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4985.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819447854
OCLC
  • ocm51896654
  • SCSB-4345434
Owning Institutions
Columbia University Libraries