Research Catalog

Planar test structures for characterizing impurities in silicon

Title
Planar test structures for characterizing impurities in silicon / M. G. Buehler [and others] ; Electronic Technology Division.
Publication
Washington : U.S. Department of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976.

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Details

Additional Authors
  • Buehler, Martin G.
  • Institute for Applied Technology (U.S.). Electronic Technology Division.
  • United States. Defense Nuclear Agency.
  • United States. Defense Advanced Research Projects Agency.
  • United States. Navy Strategic Systems Projects Office.
Series Statement
  • Semiconductor measurement technology
  • NBS special publication ; 400-21
Uniform Title
  • Semiconductor measurement technology.
  • NBS special publication ; 400-21.
Subjects
Note
  • CODEN: XNBSAV
  • "Jointly supported by the National Bureau of Standards, the Defense Nuclear Agency, The Defense Advanced Research Projects Agency, and the Navy Strategic Systems Project Office."
Bibliography (note)
  • Includes bibliographical references.
LCCN
75619390
OCLC
  • ocm01974783
  • SCSB-4350387
Owning Institutions
Columbia University Libraries