Research Catalog
Dry etching for microelectronics
- Title
- Dry etching for microelectronics / edited by Ronald A. Powell.
- Publication
- Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co., 1984.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Book/Text | Use in library | TK7871.85 .D79 1984 | Off-site |
Details
- Additional Authors
- Powell, Ronald A.
- Description
- xi, 299 p. : ill.; 24 cm.
- Series Statement
- Materials processing, theory and practices ; v. 4
- Uniform Title
- Materials processing, theory and practices ; v. 4.
- Subjects
- Note
- Includes index.
- Bibliography (note)
- Bibliography: p. 223-294.
- ISBN
- 0444869050
- LCCN
- 84001145
- OCLC
- 10913832
- ocm10913832
- SCSB-2399871
- Owning Institutions
- Columbia University Libraries