Research Catalog
Semiconductor measurement technology : notes on SEM examination of microelectronic devices
- Title
- Semiconductor measurement technology : notes on SEM examination of microelectronic devices / John R. Devaney, K. O. Leedy and W. J. Keery.
- Author
- Devaney, John R.
- Publication
- Washington : Department of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.
Items in the Library & Off-site
Filter by
1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | C 13.10:400-35 | Off-site |
Holdings
Details
- Additional Authors
- Series Statement
- NBS special publication ; 400-35
- Uniform Title
- NBS special publication ; 400-35.
- Alternative Title
- Notes on SEM examination of microelectronic devices.
- Subjects
- Note
- CODEN: XNBSAV
- Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
- Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
- Issued April 1977.
- Bibliography (note)
- Bibliography: p. 47-48.
- LCCN
- 77608011
- OCLC
- ocm02796302
- SCSB-4350044
- Owning Institutions
- Columbia University Libraries