Research Catalog

Semiconductor measurement technology : notes on SEM examination of microelectronic devices

Title
Semiconductor measurement technology : notes on SEM examination of microelectronic devices / John R. Devaney, K. O. Leedy and W. J. Keery.
Author
Devaney, John R.
Publication
Washington : Department of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.

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Details

Additional Authors
  • Leedy, Kathryn O.
  • Keery, W. J.
  • Institute for Applied Technology (U.S.). Electronic Technology Division.
  • United States. Defense Advanced Research Projects Agency.
  • Hi-Rel Laboratories.
Series Statement
NBS special publication ; 400-35
Uniform Title
NBS special publication ; 400-35.
Alternative Title
Notes on SEM examination of microelectronic devices.
Subject
  • Miniature electronic equipment > Testing
  • Semiconductors > Testing
  • Scanning electron microscopes > Technique
Note
  • CODEN: XNBSAV
  • Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
  • Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
  • Issued April 1977.
Bibliography (note)
  • Bibliography: p. 47-48.
LCCN
77608011
OCLC
  • ocm02796302
  • SCSB-4350044
Owning Institutions
Columbia University Libraries