Research Catalog

Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics

Title
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics / A. Christou ; Naval Research Laboratory.
Author
Christou, A.
Publication
Washington : Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1978.

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TextRequest in advance C 13.10:400-30Off-site

Holdings

Details

Additional Authors
  • United States. National Bureau of Standards.
  • Naval Research Laboratory (U.S.)
  • United States. Defense Advanced Research Projects Agency.
Series Statement
  • Semiconductor measurement technology
  • NBS special publication ; 400-30
Uniform Title
  • Semiconductor measurement technology.
  • NBS special publication ; 400-30.
Subjects
Note
  • Prepared by Naval Research Laboratory.
  • Activity sponsored by the Defense Advanced Research Projects Agency, through National Bureau of Standards.
  • Issued April 1978.
Bibliography (note)
  • Includes bibliographical references.
LCCN
78002200
OCLC
  • ocm03706822
  • SCSB-4352135
Owning Institutions
Columbia University Libraries