Research Catalog

Microelectronic processing laboratory at NBS

Title
Microelectronic processing laboratory at NBS / Thomas F. Leedy, Yan M. Liu, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
Author
Leedy, T. F.
Publication
Washington : Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1978.

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TextRequest in advance C 13.10:400-53Off-site

Holdings

Details

Additional Authors
  • Liu, Y. M. (Yan M.)
  • Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
  • United States. Defense Advanced Research Projects Agency.
Series Statement
  • NBS special publication ; 400-53
  • Semiconductor measurement technology
Uniform Title
  • NBS special publication ; 400-53.
  • Semiconductor measurement technology.
Subjects
Note
  • This activity was sponsored by the Defense Advanced Research Projects Agency.
  • Issued Dec. 1978.
Bibliography (note)
  • Includes bibliographical references.
LCCN
78026038
OCLC
  • ocm04494598
  • SCSB-4353147
Owning Institutions
Columbia University Libraries