Research Catalog

A wafer chuck for use between -196 and 350C̊

Title
A wafer chuck for use between -196 and 350C̊ / R. Y. Koyama and M. G. Beuhler, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
Author
Koyama, R. Y.
Publication
Washington : Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.

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Holdings

Details

Additional Authors
  • Buehler, Martin G.
  • Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
  • United States. Division of Electric Energy Systems.
  • United States. Defense Advanced Research Projects Agency.
Series Statement
  • NBS special publication ; 400-55
  • Semiconductor measurement technology
Uniform Title
  • NBS special publication ; 400-55.
  • Semiconductor measurement technology.
Subject
Note
  • Sponsored by Division of Electric Energy Systems, Department of Energy and the Defense Advanced Research Projects Agency.
Bibliography (note)
  • Includes bibliographical references.
OCLC
  • ocm04741666
  • SCSB-4353154
Owning Institutions
Columbia University Libraries