Research Catalog

Spreading resistance analysis for silicon layers with nonuniform resistivity

Title
Spreading resistance analysis for silicon layers with nonuniform resistivity / David H. Dickey, Solecon Laboratories, and James R. Ehrstein, Electron Devices Division, Center for Electronics & Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
Author
Dickey, David H.
Publication
Washington : Department of Commerce, [Office of Science and Technology], National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.

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Holdings

Details

Additional Authors
  • Ehrstein, James R.
  • Solecon Laboratories.
  • Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
  • United States. Defense Advanced Research Projects Agency.
Series Statement
  • Semiconductor measurement technology
  • NBS special publication ; 400-48
Uniform Title
  • Semiconductor measurement technology.
  • NBS special publication ; 400-48.
Subjects
Note
  • "This activity was supported by the Defense Advanced Research Projects Agency."
Bibliography (note)
  • Includes bibliographical references.
LCCN
79607012
OCLC
  • ocm04856570
  • SCSB-4353779
Owning Institutions
Columbia University Libraries